000 00304nam a2200133Ia 4500
008 220613s9999||||xx |||||||||||||| ||und||
100 _aHsu,T.R
245 0 _aMEMS & Micro Systems Design and Manufacture
250 _a2015
260 _bNew Delhi: MGH
300 _a436
650 _aECE
942 _cENG
999 _c13405
_d13405