000 00334nam a2200145Ia 4500
008 220613s9999||||xx |||||||||||||| ||und||
020 _a9780070487093
100 _aHsu,T.R.
245 0 _aMEMS & Microsystems Design And Manufacture
250 _a2016
260 _bNew Delhi: MGH
300 _a436
650 _aECE
942 _cENG
999 _c13480
_d13480