000
00334nam a2200145Ia 4500
008
220613s9999||||xx |||||||||||||| ||und||
020
_a
9780070487093
100
_a
Hsu,T.R.
245
0
_a
MEMS & Microsystems Design And Manufacture
250
_a
2016
260
_b
New Delhi: MGH
300
_a
436
650
_a
ECE
942
_c
ENG
999
_c
13480
_d
13480